A Long Stroke Electromagnetic XY Positioning Stage for Micro Applications

In this paper, a Lorentz force-based XY positioning stage with a stack of four electromagnetic linear motors in parallel configuration is presented. The overall design of the positioning stage consists of a mobile and a fixed part separated using a four-point contact technique. The uniqueness of the...

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Bibliographic Details
Published in:IEEE/ASME transactions on mechatronics 2012-10, Vol.17 (5), p.866-875
Main Authors: Khan, Muneeb Ullah, Bencheikh, Nabil, Prelle, Christine, Lamarque, Frédéric, Beutel, Tobias, Buttgenbach, Stephanus
Format: Article
Language:English
Subjects:
Actuators
Automatic
Automotive components
Automotive industry
Coils
Contact
Electromagnetic forces
Engineering Sciences
Mathematical analysis
Motion measurement
Motors
Permanent magnet motors
Stacks
Strokes
Uniqueness
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Summary:In this paper, a Lorentz force-based XY positioning stage with a stack of four electromagnetic linear motors in parallel configuration is presented. The overall design of the positioning stage consists of a mobile and a fixed part separated using a four-point contact technique. The uniqueness of the proposed positioning stage lies in its light design with the ability to perform variable strokes at short (< 100 \mu m) and long range (millimeter level) with preembedded auto guidance feature. The analytical modeling and experiment have been realized. The open- and closed-loop performance of positioning stage in linear and nonlinear trajectories have been tested and good agreement is observed between experimental and analytical results. The positioning stage is able to perform variable strokes up till 2 mm in the xy plane. In closed loop, the maximum precision errors in short and long strokes are found to be 0.031 and 0.451 μm, respectively. The maximum travel speed is 12 mm/s in open loop.
ISSN:1083-4435
1941-014X
DOI:10.1109/TMECH.2011.2142319