Imaging the surface stress and vibration modes of a microcantilever by laser beam deflection microscopy

There is a need for noninvasive techniques for simultaneous imaging of the stress and vibration mode shapes of nanomechanical systems in the fields of scanning probe microscopy, nanomechanical biological and chemical sensors and the semiconductor industry. Here we show a novel technique that combine...

Full description

Saved in:
Bibliographic Details
Published in:Nanotechnology 2012-08, Vol.23 (31), p.315501-315501
Main Authors: Tamayo, Javier, Pini, Valerio, Kosaka, Prisicila, Martinez, Nicolas F, Ahumada, Oscar, Calleja, Montserrat
Format: Article
Language:English
Subjects:
Biosensing Techniques - instrumentation
Biosensing Techniques - methods
Deflection
Electrochemistry - instrumentation
Electrochemistry - methods
Finite Element Analysis
Imaging
Lasers
Microscopy, Confocal - instrumentation
Microscopy, Confocal - methods
Microscopy, Scanning Probe - instrumentation
Microscopy, Scanning Probe - methods
Nanocomposites
Nanomaterials
Nanostructure
Nanotechnology - instrumentation
Nanotechnology - methods
Semiconductors
Semiconductors - instrumentation
Stresses
Surface Properties - radiation effects
Vibration
Vibration mode
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:There is a need for noninvasive techniques for simultaneous imaging of the stress and vibration mode shapes of nanomechanical systems in the fields of scanning probe microscopy, nanomechanical biological and chemical sensors and the semiconductor industry. Here we show a novel technique that combines a scanning laser, the beam deflection method and digital multifrequency excitation and analysis for simultaneous imaging of the static out-of-plane displacement and the shape of five vibration modes of nanomechanical systems. The out-of-plane resolution is at least 100 pm Hz−1 2 and the lateral resolution, which is determined by the laser spot size, is 1-1.5 μm. The capability of the technique is demonstrated by imaging the residual surface stress of a microcantilever together with the shape of the first 22 vibration modes. The vibration behavior is compared with rigorous finite element simulations. The technique is suitable for major improvements in the imaging of liquids, such as higher bandwidth and enhanced spatial resolution.
ISSN:0957-4484
1361-6528
DOI:10.1088/0957-4484/23/31/315501