Laminar and blazed type holographic gratings for a versatile soft x-ray spectrograph attached to an electron microscope and their evaluation in the 50-200 eV range

Laminar and blazed type holographic varied-line-spacing spherical gratings for use in a versatile soft x-ray flat-field spectrograph attached to an electron microscope are designed, fabricated, and evaluated. The absolute diffraction efficiencies of laminar (or blazed) master and replica gratings at...

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Bibliographic Details
Published in:Applied optics (2004) 2012-05, Vol.51 (13), p.2351-2360
Main Authors: Imazono, Takashi, Koike, Masato, Kawachi, Tetsuya, Hasegawa, Noboru, Koeda, Masaru, Nagano, Tetsuya, Sasai, Hiroyuki, Oue, Yuki, Yonezawa, Zeno, Kuramoto, Satoshi, Terauchi, Masami, Takahashi, Hideyuki, Handa, Nobuo, Murano, Takanori, Sano, Kazuo
Format: Article
Language:English
Subjects:
Diffraction efficiency
Diffraction gratings
Electron microscopes
Emission
Gratings (spectra)
Laminar
Soft x-rays
Spectrographs
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Summary:Laminar and blazed type holographic varied-line-spacing spherical gratings for use in a versatile soft x-ray flat-field spectrograph attached to an electron microscope are designed, fabricated, and evaluated. The absolute diffraction efficiencies of laminar (or blazed) master and replica gratings at 86.00° incidence evaluated by synchrotron radiation show over 5% (or 8%) in the 50-200 eV range with the maxima of 22% (or 26%-27%). Also the resolving power evaluated by a laser produced plasma source is in excess of 700 at the energy near the K emission spectrum of lithium (~55 eV) for all gratings. Moreover, the K emission spectrum of metallic Li with high spectral resolution is successfully observed with the spectrograph attached to a transmission electron microscope.
ISSN:1559-128X
2155-3165
DOI:10.1364/AO.51.002351