Laminar and blazed type holographic gratings for a versatile soft x-ray spectrograph attached to an electron microscope and their evaluation in the 50-200 eV range

Laminar and blazed type holographic varied-line-spacing spherical gratings for use in a versatile soft x-ray flat-field spectrograph attached to an electron microscope are designed, fabricated, and evaluated. The absolute diffraction efficiencies of laminar (or blazed) master and replica gratings at...

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Published in:Applied optics (2004) 2012-05, Vol.51 (13), p.2351-2360
Main Authors: Imazono, Takashi, Koike, Masato, Kawachi, Tetsuya, Hasegawa, Noboru, Koeda, Masaru, Nagano, Tetsuya, Sasai, Hiroyuki, Oue, Yuki, Yonezawa, Zeno, Kuramoto, Satoshi, Terauchi, Masami, Takahashi, Hideyuki, Handa, Nobuo, Murano, Takanori, Sano, Kazuo
Format: Article
Language:English
Subjects:
Diffraction efficiency
Diffraction gratings
Electron microscopes
Emission
Gratings (spectra)
Laminar
Soft x-rays
Spectrographs
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cited_by cdi_FETCH-LOGICAL-c324t-d2a3e9d48e609f354f42b90b6f5f99eba88021fb323a37e68f0cc5e18dd926ab3
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container_end_page 2360
container_issue 13
container_start_page 2351
container_title Applied optics (2004)
container_volume 51
creator Imazono, Takashi
Koike, Masato
Kawachi, Tetsuya
Hasegawa, Noboru
Koeda, Masaru
Nagano, Tetsuya
Sasai, Hiroyuki
Oue, Yuki
Yonezawa, Zeno
Kuramoto, Satoshi
Terauchi, Masami
Takahashi, Hideyuki
Handa, Nobuo
Murano, Takanori
Sano, Kazuo
description Laminar and blazed type holographic varied-line-spacing spherical gratings for use in a versatile soft x-ray flat-field spectrograph attached to an electron microscope are designed, fabricated, and evaluated. The absolute diffraction efficiencies of laminar (or blazed) master and replica gratings at 86.00° incidence evaluated by synchrotron radiation show over 5% (or 8%) in the 50-200 eV range with the maxima of 22% (or 26%-27%). Also the resolving power evaluated by a laser produced plasma source is in excess of 700 at the energy near the K emission spectrum of lithium (~55 eV) for all gratings. Moreover, the K emission spectrum of metallic Li with high spectral resolution is successfully observed with the spectrograph attached to a transmission electron microscope.
doi_str_mv 10.1364/AO.51.002351
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source Optica Publishing Group Journals
subjects Diffraction efficiency
Diffraction gratings
Electron microscopes
Emission
Gratings (spectra)
Laminar
Soft x-rays
Spectrographs
title Laminar and blazed type holographic gratings for a versatile soft x-ray spectrograph attached to an electron microscope and their evaluation in the 50-200 eV range
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