Quasi-fractional Talbot effect of resonant diffraction grating

The Fresnel diffraction of resonant diffraction grating is studied on the basis of the modal method, and it shows that the conventional fractional Talbot effect can still occur by choosing appropriate parameters. The Fresnel diffraction distributions of the resonant diffraction gratings with periods...

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Bibliographic Details
Published in:Optics communications 2012-10, Vol.285 (21-22), p.4161-4165
Main Authors: Fang, Yue, Tan, Qiaofeng, Zhang, Mingqian, Jin, Guofan
Format: Article
Language:English
Subjects:
Diffraction gratings
Fresnel diffraction
Lithography
Modal method
Patterning
Propagation
Quasi-fractional Talbot effect
Resonant diffraction grating
Simulation
Talbot effect
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Summary:The Fresnel diffraction of resonant diffraction grating is studied on the basis of the modal method, and it shows that the conventional fractional Talbot effect can still occur by choosing appropriate parameters. The Fresnel diffraction distributions of the resonant diffraction gratings with periods between λ and 4λ are analyzed, and the diffraction fields exhibit periodicity in both grating direction and the propagating direction. The experiment is carried out to verify the simulation results of the quasi-fractional Talbot effect of the resonant diffraction grating. This effect has potential application in lithography for high-resolution patterning.
ISSN:0030-4018
1873-0310
DOI:10.1016/j.optcom.2012.06.073