Mapping of minority carrier lifetime distributions in multicrystalline silicon using transient electron-beam-induced current

We have used transient electron-beam-induced current (EBIC) to map minority carrier lifetime distributions in multicrystalline Silicon (mc-Si). In this technique, the electron beam from a scanning transmission electron microscope was on-off modulated while the sample was scanned. The resulting trans...

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Published in:Journal of electron microscopy 2012-10, Vol.61 (5), p.293-298
Main Authors: Kushida, Takuya, Tanaka, Shigeyasu, Morita, Chiaki, Tanji, Takayoshi, Ohshita, Yoshio
Format: Article
Language:English
Subjects:
Computer simulation
Electron beams
Electrons
Mapping
Mathematical analysis
Mathematical models
Microscopy, Electron, Scanning - methods
Minority carriers
Models, Theoretical
Numerical analysis
Scanning electron microscopy
Silicon
Silicon Compounds - chemistry
Silicon wafers
Transients and Migrants
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cited_by cdi_FETCH-LOGICAL-c354t-8f94405453d90d7031875259eb56ba5e7bdec7a8b3f400983f46f57a170c92eb3
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container_issue 5
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container_title Journal of electron microscopy
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creator Kushida, Takuya
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Tanji, Takayoshi
Ohshita, Yoshio
description We have used transient electron-beam-induced current (EBIC) to map minority carrier lifetime distributions in multicrystalline Silicon (mc-Si). In this technique, the electron beam from a scanning transmission electron microscope was on-off modulated while the sample was scanned. The resulting transient EBIC was analyzed to form a lifetime map. An analytical function was introduced as part of the analysis in determining this map. We have verified this approach using numerical simulations and have reproduced a lifetime map for an mc-Si wafer.
doi_str_mv 10.1093/jmicro/dfs050
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source Oxford Journals Online
subjects Computer simulation
Electron beams
Electrons
Mapping
Mathematical analysis
Mathematical models
Microscopy, Electron, Scanning - methods
Minority carriers
Models, Theoretical
Numerical analysis
Scanning electron microscopy
Silicon
Silicon Compounds - chemistry
Silicon wafers
Transients and Migrants
title Mapping of minority carrier lifetime distributions in multicrystalline silicon using transient electron-beam-induced current
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