Angular laser cleaning for effective removal of particles from a solid surface

Laser removal of small particles from a metal surface is carried out by changing the incident angle of the laser beam. It has been found that a dramatic improvement of cleaning efficiency in terms of area and energy is observed when using the laser at glancing angle of incidence as compared to perpe...

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 2000-12, Vol.71 (6), p.671-674
Main Authors: LEE, J. M, WATKINS, K. G, STEEN, W. M
Format: Article
Language:English
Subjects:
Adhesion
Angle of incidence
Cleaning
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Damage
Electron and ion emission by liquids and solids
impact phenomena
Energy use
Exact sciences and technology
Impact phenomena (including electron spectra and sputtering)
Laser beams
Laser-beam impact phenomena
Lasers
Materials science
Physics
Solid surfaces
Surface cleaning, etching, patterning
Surface treatments
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Summary:Laser removal of small particles from a metal surface is carried out by changing the incident angle of the laser beam. It has been found that a dramatic improvement of cleaning efficiency in terms of area and energy is observed when using the laser at glancing angle of incidence as compared to perpendicular. Furthermore substrate damage is greatly reduced and probably eliminated at glancing angles. The process mechanism is discussed by considering the adhesion and the laser-induced cleaning forces for different incident angles. It is shown that there are different laser--matter interactions operating.
ISSN:0947-8396
1432-0630
DOI:10.1007/s003390000583