Structural and electrical properties of polycrystalline PbZr0.5Ti0.5O3 films deposited on La0.5Sr0.5CoO3 coated silicon by sol-gel process

• Published in: Applied physics. A, Materials science & processing Materials science & processing, 2002-05, Vol.74 (5), p.707-710
• Main Authors: WANG, G. S, MENG, X. J, LAI, Z. Q, YU, J, SUN, J. L, CHENG, J. G, TANG, J, GUO, S. L, CHU, J. H
• Format: Article
• Language: English
• Subjects: Acetates; Coercive force; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Deposition; Dielectric, piezoelectric, ferroelectric and antiferroelectric materials; Dielectrics, piezoelectrics, and ferroelectrics and their properties; Electric fields; Exact sciences and technology; Fatigue (materials); Lead zirconate titanates; Liquid phase epitaxy; deposition from liquid phases (melts, solutions, and surface layers on liquids); Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Niobates, titanates, tantalates, pzt ceramics, etc; Physics; Polarization; Sol gel process; Structure and morphology; thickness; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin film structure and morphology
• ISSN: 0947-8396; 1432-0630
• DOI: 10.1007/s003390100941

La0.5Sr0.5CoO3 (LSCO) films have been grown on Si (100) by a metalorganic chemical liquid deposition (MOCLD) technique using lanthanum acetate, strontium acetate and cobalt acetate as the starting materials. Subsequent PbZr0.5Ti0.5O3 (PZT) films were deposited onto LSCO films by a modified sol-gel method. Field-emission scanning electron microscopy and X-ray diffraction analysis show that PZT and LSCO films are polycrystalline and entirely perovskite phase. At an applied electric field of 250 kV/cm, the Pt/PZT/LSCO capacitor shows no polarization fatigue after 3X10 switching cycles and an internal electric field; the remnant polarization Pr and the coercive field Ec are about 22 *mC/cm and 73 kV/cm, respectively. The dielectric constant of PZT films is 650 at a frequency of 1 kHz.