Pulsed laser deposition of metals: consequences of the energy distribution within the laser spot on film growth

The strong influence of the lens position during pulsed laser deposition of metallic films is shown by measuring the energy distribution within the laser spot and its consequences for the deposition rate and kinetic energy of the deposited ions. This is analyzed together with the spot size and the d...

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 2004-09, Vol.79 (4-6), p.1005-1007
Main Authors: BRANDENBURG, J, NEU, V, WENDROCK, H, HOLZAPEEL, B, KREBS, H.-U, FÄHLER, S
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Deposition
Energy distribution
Exact sciences and technology
Film growth
Kinetic energy
Laser deposition
Lasers
Lenses
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Pulsed laser deposition
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Summary:The strong influence of the lens position during pulsed laser deposition of metallic films is shown by measuring the energy distribution within the laser spot and its consequences for the deposition rate and kinetic energy of the deposited ions. This is analyzed together with the spot size and the dependence of the deposition rate on the overall laser energy .
ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-004-2615-0