Effects of the growth and the charge of carbon nanoparticles on direct current discharges

The formation of fine particles in plasmas from sputtered carbon atoms and the consequences of their growth and charging mechanisms on sputtering DC discharges were investigated. Experiments were performed with a constant discharge current so that the coupling between the plasma and two successive g...

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Bibliographic Details
Published in:Physics of plasmas 2013-01, Vol.20 (1)
Main Authors: Arnas, C., Michau, A., Lombardi, G., Couëdel, L., Kumar K, Kishor
Format: Article
Language:English
Subjects:
ATOMS
CARBON
COUPLING
DIRECT CURRENT
EMISSION
EVOLUTION
GLOW DISCHARGES
HEATING
IONIZATION
NANOSCIENCE AND NANOTECHNOLOGY
NANOSTRUCTURES
PARTICLES
Physics
PLASMA
PLASMA IMPURITIES
Plasma Physics
PRECURSOR
SPUTTERING
WALL EFFECTS
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Summary:The formation of fine particles in plasmas from sputtered carbon atoms and the consequences of their growth and charging mechanisms on sputtering DC discharges were investigated. Experiments were performed with a constant discharge current so that the coupling between the plasma and two successive generations of nanoparticles were studied through the evolution of the discharge voltage, proportional to the ionization rate and also through the plasma emission. The consequences of the formation of negative ionic molecular precursors of the first particle generation were established as well as the effects of a redistribution of the nanoparticle cloud in the inter-electrode gap, not similar to the void effects usually observed in RF discharges. The cathode heating during the sputtering mechanism was also considered to explain partly the evolution of the discharge voltage and the plasma emission during the growth of the second nanoparticle generation.
ISSN:1070-664X
1089-7674
DOI:10.1063/1.4776681