Development of tilted hexagonal platelet ZnO using atmospheric pressure chemical vapor deposition and investigation of its growth mechanism

Large area ZnO films (25×25 cm 2 ) grown via atmospheric pressure chemical vapor deposition (APCVD) showed unique surface morphologies of tilted hexagonal platelets. In response to the tilt angle change from 50° to 75°, haze values increased from 7% to 25%, indicating that tilt angles directly affec...

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Bibliographic Details
Published in:Applied physics letters 2012-02, Vol.100 (6), p.061909-061909-3
Main Authors: Yoo, Y. Z., Kim, S. H., Yoon, G. S., Choi, E. H., Park, J.-W., Park, J. H., Kim, B.-G., Jung, S. C., Park, B. M.
Format: Article
Language:English
Subjects:
Atmospheric pressure
Barometric pressure
Camber
Chemical vapor deposition
Density
Oxidizers
Tilt
Zinc oxide
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Summary:Large area ZnO films (25×25 cm 2 ) grown via atmospheric pressure chemical vapor deposition (APCVD) showed unique surface morphologies of tilted hexagonal platelets. In response to the tilt angle change from 50° to 75°, haze values increased from 7% to 25%, indicating that tilt angles directly affected the light-trapping capabilities of films. These unique surfaces were created when H 2 O oxidizers were used, while powder-like ZnO formed when O 2 or O 3 oxidizers were used. Based on experimental results, corresponding density function theory, and thermodynamic calculations, the initial growth and property of APCVD for ZnO on glass were elucidated.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3681163