Direct visualization method of the atomic structure of light and heavy atoms with double-detector Cs-corrected scanning transmission electron microscopy

The advent of Cs-corrected scanning transmission electron microscopy (STEM) has advanced the observation of atomic structures in materials and nanotechnology devices. High-angle annular dark-field (HAADF)-STEM using an annular detector visualizes heavy elements as bright spots at atomic resolution t...

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Bibliographic Details
Published in:Applied physics letters 2012-09, Vol.101 (13)
Main Author: Kotaka, Yasutoshi
Format: Article
Language:English
Subjects:
Annular
Atomic structure
Bright spots
Color
Imaging
Scanning electron microscopy
Scanning transmission electron microscopy
Online Access:Get full text
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Summary:The advent of Cs-corrected scanning transmission electron microscopy (STEM) has advanced the observation of atomic structures in materials and nanotechnology devices. High-angle annular dark-field (HAADF)-STEM using an annular detector visualizes heavy elements as bright spots at atomic resolution that can be observed with the Z-contrast technique. In this study, the atomic column of light elements is directly observed as bright spots by middle-angle bright-field (MABF)-STEM imaging. Therefore, a double-detector STEM imaging method was developed, exploiting the advantage of both MABF-STEM and HAADF-STEM to maximum, which consists of multiple exposures of simultaneously observed MABF- and HAADF-STEM images in red-green-blue color.
ISSN:0003-6951
DOI:10.1063/1.4756783