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Silicon-on-insulator chip-to-chip coupling via out-of-plane or vertical grating couplers

In this work, we study the possibility of chip-to-chip interconnections via out-of-plane grating couplers or vertical grating couplers (VGCs) fabricated on silicon-on-insulator (SOI) technology. Mathematical and experimental results for the efficiency of coupling light between two such grating coupl...

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Published in:Applied optics (2004) 2012-12, Vol.51 (34), p.8090-8094
Main Authors: Cabezón, Miguel, Garcés, Ignacio, Villafranca, Asier, Pozo, José, Kumar, Pragati, Kaźmierczak, Andrzej
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container_issue 34
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container_title Applied optics (2004)
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creator Cabezón, Miguel
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description In this work, we study the possibility of chip-to-chip interconnections via out-of-plane grating couplers or vertical grating couplers (VGCs) fabricated on silicon-on-insulator (SOI) technology. Mathematical and experimental results for the efficiency of coupling light between two such grating couplers have been presented. The VGCs are placed vertically against each other in order to study the effect of spatial misalignments on the light coupling efficiency. Waveguides and VGCs are designed according to standard SOI fabrication processes. A two-dimensional finite-difference time-domain method is used for the simulations. Measurements are performed on different combinations of 4 samples on the chip. Light coupling efficiency of -8  dB is achieved and tolerances to misalignments in 3 spatial dimensions are provided.
doi_str_mv 10.1364/AO.51.008090
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subjects Computational efficiency
Computing time
Couplers
Diffraction gratings
Gratings (spectra)
Joining
Mathematical analysis
Misalignment
title Silicon-on-insulator chip-to-chip coupling via out-of-plane or vertical grating couplers
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