Two-photon polymerization technique with sub-50 nm resolution by sub-10 fs laser pulses

Nanofabrication of structures with a feature size of sub-50 nm with ultrashort-laser based two-photon polymerization (2PP) technique is presented. The spatial resolution of the 2PP structures depends on the characteristics of the polymer material and the laser system used for fabrication. Here we co...

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Bibliographic Details
Published in:Optical materials express 2012-07, Vol.2 (7), p.942-947, Article 942
Main Authors: Emons, Moritz, Obata, Kotaro, Binhammer, Thomas, Ovsianikov, Aleksandr, Chichkov, Boris N., Morgner, Uwe
Format: Article
Language:English
Subjects:
Crosslinking
Lasers
Nanocomposites
Nanomaterials
Nanostructure
Polymerization
Sol gel process
Spatial resolution
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Summary:Nanofabrication of structures with a feature size of sub-50 nm with ultrashort-laser based two-photon polymerization (2PP) technique is presented. The spatial resolution of the 2PP structures depends on the characteristics of the polymer material and the laser system used for fabrication. Here we compare the successful creation of sub-100 nm structures with two different few-cycle laser systems and chemically modified zirconium-based sol-gel composite material using cross-linker for resolution enhancement.
ISSN:2159-3930
2159-3930
DOI:10.1364/ome.2.000942