NiTi/Pb(Zr0.52Ti0.48)O3 thin film heterostructures for vibration damping in MEMS

We report on the damping properties of NiTi/Pb(Zr0.52Ti0.48)O3 (PZT) heterostructures using nanoindentation technique. Creep and impact tests were performed to obtain hardness (H), elastic modulus (Er), damping factor (tanδ) and figure of merit (FOM. A hold time of 30s during creep test shows signif...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2013-04, Vol.193, p.30-34
Main Authors: Choudhary, Nitin, Kharat, D.K., Van Humbeeck, J., Kaur, Davinder
Format: Article
Language:English
Subjects:
Damping
Intermetallics
Lead zirconate titanates
Magnetron sputtering
Nanoindentation
Nickel base alloys
Nickel compounds
Nickel titanides
Piezoelectric materials
Shape memory alloys
Shape memory materials
Thin films
Titanium compounds
Vibration damping
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Summary:We report on the damping properties of NiTi/Pb(Zr0.52Ti0.48)O3 (PZT) heterostructures using nanoindentation technique. Creep and impact tests were performed to obtain hardness (H), elastic modulus (Er), damping factor (tanδ) and figure of merit (FOM. A hold time of 30s during creep test shows significant improvement in damping factor for NiTi/PZT (0.046) and CrTiN/NiTi/PZT (0.050). Impact test demonstrates highest damping capacity with lowest coefficient of restitution (0.30) in CrTiN/NiTi/PZT. Higher hardness (19.8GPa) and excellent figure of merit (0.751) in CrTiN/NiTi/PZT makes them very attractive damping material for microelectromechanical systems (MEMS).
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2012.12.005