Formation of Ordered FePt(001) Texture With Reduced Diffusion Length

Samples with glass/CrRu(90 nm)/Pt(2 nm)/FePt(20 nm) film structure were sequentially planetary-sputtered at an in situ heating temperature of 350degC to investigate the effect of sputtering rate on the ordering of L1 0 -FePt (001) films. The degree of chemical ordering was enhanced by lowering the s...

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Bibliographic Details
Published in:IEEE transactions on magnetics 2009-10, Vol.45 (10), p.3580-3583
Main Authors: Shien-Wen Wang, Sun, A.C., Fu-Te Yuan, Jen-Hwa Hsu, Po-Cheng Kuo
Format: Article
Language:English
Subjects:
Atomic layer deposition
Chemicals
Cross-disciplinary physics: materials science
rheology
Diffusion length
Epitaxial growth
Exact sciences and technology
FePt
Ferrous alloys
Glass
Heating
Intermetallics
Iron
Iron compounds
Lattices
Magnetic films
Magnetism
Materials science
Order disorder
ordering
Other topics in materials science
perpendicular anisotropy
Physics
Platinum compounds
Sputtering
Temperature
Texture
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Summary:Samples with glass/CrRu(90 nm)/Pt(2 nm)/FePt(20 nm) film structure were sequentially planetary-sputtered at an in situ heating temperature of 350degC to investigate the effect of sputtering rate on the ordering of L1 0 -FePt (001) films. The degree of chemical ordering was enhanced by lowering the sputtering rate of the FePt layer. The slow sputtering process also promoted the formation of the (001) preferred orientation by improving epitaxial growth, because the thickness of the Fe and Pt layers in each revolution become smaller as the sputtering rate was reduced. Therefore, the diffusion lengths of the Fe and Pt atoms required for migration into the L 1 0 lattice sites became shorter. The sputter parameters can be optimized to form ordered FePt (001) films with a high magnetic squareness ratio ( 0.8) and large coercivity at 300degC, which is 50degC lower than in previous reports. The results herein provide useful information on the fabrication of FePt films with perpendicular anisotropy at low temperatures in media use.
ISSN:0018-9464
1941-0069
DOI:10.1109/TMAG.2009.2023861