Collecting optical coherence elastography depth profiles with a micromachined cantilever probe

We present an experimental setup that combines optical coherence elastography depth sensing with atomic force microscope indentation. The instrument relies on a miniaturized cantilever probe that compresses a sample with a small footprint force and simultaneously collects an optical coherence tomogr...

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Published in:Optics letters 2013-05, Vol.38 (9), p.1476-1478
Main Authors: Chavan, Dhwajal, Mo, Jianhua, de Groot, Mattijs, Meijering, Anna, de Boer, Johannes F, Iannuzzi, Davide
Format: Article
Language:English
Subjects:
Coherence
Deflection
Footprints
Indentation
Micromachining
Micromechanics
Optical Coherence Tomography
Optical fibers
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description We present an experimental setup that combines optical coherence elastography depth sensing with atomic force microscope indentation. The instrument relies on a miniaturized cantilever probe that compresses a sample with a small footprint force and simultaneously collects an optical coherence tomography (OCT) depth profile underneath the indenting point. The deflection of the cantilever can be monitored via optical fiber interferometry with a resolution of 2 nm. The OCT readout then provides depth profiles of the subsurface layer deformation with 15 nm resolution and depth range of a few millimeters.
doi_str_mv 10.1364/OL.38.001476
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source OSA_美国光学学会数据库1
subjects Coherence
Deflection
Footprints
Indentation
Micromachining
Micromechanics
Optical Coherence Tomography
Optical fibers
title Collecting optical coherence elastography depth profiles with a micromachined cantilever probe
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