Vibration modulated subaperture stitching interferometry

A novel subaperture stitching interferometry is developed to measure the surface deformation of the lens by utilizing the mechanical vibration induced from a motorized stage. The interferograms of different subapertures are acquired on the fly while the tested optics is rotating against its symmetri...

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Bibliographic Details
Published in:Optics express 2013-07, Vol.21 (15), p.18255-18260
Main Authors: Liang, Chao-Wen, Chang, Hung-Sheng, Lin, Po-Chih, Lee, Cheng-Chung, Chen, Yi-Chun
Format: Article
Language:English
Subjects:
Computer Simulation
Computer-Aided Design
Equipment Design
Equipment Failure Analysis
Feasibility Studies
Interferometry - instrumentation
Lenses
Light
Micro-Electrical-Mechanical Systems - instrumentation
Models, Theoretical
Scattering, Radiation
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Summary:A novel subaperture stitching interferometry is developed to measure the surface deformation of the lens by utilizing the mechanical vibration induced from a motorized stage. The interferograms of different subapertures are acquired on the fly while the tested optics is rotating against its symmetrical axis. The measurement throughput and the subaperture positioning accuracy are improved simultaneously by adopting both the synchronous rotational scanning mechanism and the non-uniform phase shifting algorithm. The experimental measurement shows the stitched phase RMS error of 0.0037 waves proving the feasibility of the proposed phase acquisition method.
ISSN:1094-4087
1094-4087
DOI:10.1364/oe.21.018255