Microstructures of the interlayer in Mo/Si multilayers induced by proton irradiation

• Published in: Science China. Physics, mechanics & astronomy mechanics & astronomy, 2012-11, Vol.55 (11), p.2194-2198
• Main Authors: Lv, Peng, Wang, XiaoDong, Liu, Hai, Zhang, ZaiQiang, Guan, JinTong, Chen, Bo, Guan, QingFeng
• Format: Article
• Language: English
• Subjects: Astronomy; Classical and Continuum Physics; Doppler effect; High resolution electron microscopy; Interlayers; Irradiation; Microstructure; Mo5Si3; Molybdenum disilicides; Multilayers; Observations and Techniques; Optical properties; Physics; Physics and Astronomy; Preferred orientation; Proton irradiation; Red shift; Soft x rays; Texture; 中间层; 光学性能; 太阳望远镜; 微观结构; 组织诱导; 质子辐照; 高分辨透射电子显微镜
• ISSN: 1674-7348; 1869-1927
• DOI: 10.1007/s11433-012-4908-1

In this work, the microstructure and optical properties of the Mo/Si multilayers mirror for the space extreme-ultraviolet solar telescope before and after 100 keV proton irradiation have been investigated. EUV/soft X-ray reflectometer （EXRR） results showed that, after proton irradiation, the reflectivity of the Mo/Si multilayer decreased from 12.20% to 8.34% and the center wavelength revealed red shift of 0.38 nm, as compared with those before proton irradiation. High-resolution transmission electron microscopy （HRTEM） observations revealed the presence of MoSi2, Mo3Si and Mo5Si3 in Mo-on-Si interlayers before irradiation. The preferred orientation such as MoSi2 with （101） texture and Mo5Si3 with （310） texture was formed in Mo-on-Si interlayers after proton irradiation, which led to the increase of thickness in the interlayers. It is suggested that the changes of microstructures in Mo/Si multilayers under proton irradiation could cause optical properties degradation.