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Possibilities for combined resistometry and infrared Fourier-spectroscopy in monitoring formation of compact metal-oxide nanocomposites
A combination of infrared reflection Fourier-spectroscopy, resistometry, and gravimetry are used to monitor properties of a nanostructured metal-oxide coating prepared by reactive sputtering in a vacuum followed by low temperature oxidation in an air atmosphere at 50°C. This makes it possible to pre...
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Published in: | Measurement techniques 2012-12, Vol.55 (9), p.1108-1112 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | A combination of infrared reflection Fourier-spectroscopy, resistometry, and gravimetry are used to monitor properties of a nanostructured metal-oxide coating prepared by reactive sputtering in a vacuum followed by low temperature oxidation in an air atmosphere at 50°C. This makes it possible to prepare metal oxide coatings controlled with respect to composition and thickness for practical use with functional properties. |
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ISSN: | 0543-1972 1573-8906 |
DOI: | 10.1007/s11018-012-0068-y |