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Possibilities for combined resistometry and infrared Fourier-spectroscopy in monitoring formation of compact metal-oxide nanocomposites

A combination of infrared reflection Fourier-spectroscopy, resistometry, and gravimetry are used to monitor properties of a nanostructured metal-oxide coating prepared by reactive sputtering in a vacuum followed by low temperature oxidation in an air atmosphere at 50°C. This makes it possible to pre...

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Bibliographic Details
Published in:Measurement techniques 2012-12, Vol.55 (9), p.1108-1112
Main Authors: Kotenev, V. A., Sokolova, N. P., Gorbunov, A. M., Maksaeva, L. B., Kiselev, M. R., Tsivadze, A. Yu
Format: Article
Language:English
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Summary:A combination of infrared reflection Fourier-spectroscopy, resistometry, and gravimetry are used to monitor properties of a nanostructured metal-oxide coating prepared by reactive sputtering in a vacuum followed by low temperature oxidation in an air atmosphere at 50°C. This makes it possible to prepare metal oxide coatings controlled with respect to composition and thickness for practical use with functional properties.
ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-012-0068-y