Nanotribological properties of silicon surfaces nanopatterned by laser interference lithography

The problems caused by the adhesive force and friction force become more critical when the size of M/NEMS devices shrinks to micro/nano-scale. The nanotexture-patterned surface is an effective approach to reduce friction force on micro/nano-scale. Laser interference lithography is an attractive meth...

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Bibliographic Details
Published in:Journal of Russian laser research 2013-05, Vol.34 (3), p.288-294
Main Authors: He, Haidong, Yang, Haifeng, Zhao, Enlan, Hao, Jingbin, Qian, Jiguo, Tang, Wei, Zhu, Hua
Format: Article
Language:English
Subjects:
Friction
Interference
Lasers
Lithography
Microwaves
Nanocomposites
Nanomaterials
Nanostructure
Optical Devices
Optics
Photonics
Physics
Physics and Astronomy
RF and Optical Engineering
Silicon
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Summary:The problems caused by the adhesive force and friction force become more critical when the size of M/NEMS devices shrinks to micro/nano-scale. The nanotexture-patterned surface is an effective approach to reduce friction force on micro/nano-scale. Laser interference lithography is an attractive method to fabricate micro/nanotextures, which is maskless and allows large area periodical structures to be patterned by a couple of seconds’ exposure in a simple equipment system. We fabricate various nanogrooves with different pitch and space width on silicon wafers by laser interference lithography and chemical etching. We investigate the nanotribological properties of the patterned surfaces by AFM/FFM. We show that friction on the nano/micro-scale is related to the coverage rate of the nanogrooves, which decreases with increase in the space width and decrease in the pitch.
ISSN:1071-2836
1573-8760
DOI:10.1007/s10946-013-9353-8