Design and sub-beam phase measurement of Dammann grating with three-phase array output

An improved type of Dammann grating (DG) that could generate an equal-intensity spot array which has only three phases is proposed. Numerical solutions of 1×4 and 1×5 such DGs are given. A 4×4 two-phase DG manufactured by very-large-scale integration (VLSI) techniques is presented. A phase-shift-int...

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Bibliographic Details
Published in:Optics letters 2013-08, Vol.38 (15), p.2663-2665
Main Authors: Li, Bing, Zhi, Ya'nan, Sun, Jianfeng, Zhang, Ning, Zhou, Yu, Wang, Lijuan, Hou, Peipei, Liu, Liren
Format: Article
Language:English
Subjects:
Arrays
Beams (radiation)
Diffraction gratings
Gratings (spectra)
Integrated circuits
Performance measurement
Splitting
Three phase
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Summary:An improved type of Dammann grating (DG) that could generate an equal-intensity spot array which has only three phases is proposed. Numerical solutions of 1×4 and 1×5 such DGs are given. A 4×4 two-phase DG manufactured by very-large-scale integration (VLSI) techniques is presented. A phase-shift-interferometry-based technique that measures the intensity and sub-beam phases of beam splitting gratings is proposed. The performance measurements of the manufactured 4×4 two-phase DG using the proposed technique is carried out.
ISSN:0146-9592
1539-4794
DOI:10.1364/OL.38.002663