Three-dimensional nanostructures by focused ion beam techniques: Fabrication and characterization

Three-dimensional (3D) nanostructures and nanodevices have attracted tremendous interest in the past few years due to their special mechanical and physical properties. Nanodevices using 3D nanostructures as the building blocks have been demonstrated to exhibit multifunctionality and functions that c...

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Bibliographic Details
Published in:Journal of materials research 2013-11, Vol.28 (22), p.3063-3078
Main Authors: Li, Wuxia, Gu, Changzhi, Cui, Ajuan, Fenton, J.C., Jiang, Qianqing, Warburton, P.A., Shen, Tiehan H.
Format: Article
Language:English
Subjects:
3-D technology
Adsorption
Analysis
Applied and Technical Physics
Biomaterials
By products
Decomposition
Electronics
Electrons
Inorganic Chemistry
Invited Feature Papers
Ion beams
Materials Engineering
Materials research
Materials Science
Nanomaterials
Nanostructured materials
Nanotechnology
Nanowires
Production methods
Studies
Superconductors
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Summary:Three-dimensional (3D) nanostructures and nanodevices have attracted tremendous interest in the past few years due to their special mechanical and physical properties. Nanodevices using 3D nanostructures as the building blocks have been demonstrated to exhibit multifunctionality and functions that conventional planar devices cannot achieve. In this article, we report and review focused ion beam techniques for direct site-specific growth of 3D nanostructures and postgrowth shape modification of freestanding nanostructures by ion beam-induced chemical vapor deposition and ion-beam-irradiation-induced plastic bending, respectively. Such techniques have shown nanometer-scale resolution and accuracy in the fabrication of metallic nanoelectrodes, 3D pickup coils, nanogaps, and multibranched structures. Characterization of the resulting nanostructures shows that focused ion beam techniques allow conducting and superconducting freestanding 3D structures to be tailored in size, geometry, and integrated with planar electronic, mechanical, and superconducting nanodevices, potentially enabling lab-on-a-chip experiments.
ISSN:0884-2914
2044-5326
DOI:10.1557/jmr.2013.324