Photoacid Generating Ligands for Development of Positive-Tone Directly Photopatternable Metal Complexes

Photoacid generating ligands, 4-(2-nitrobenzy-loxycarbonyl)catechol and 4-(6-nitroveratryloxycarbonyl)catechol, and indium tin and titanium complexes thereof, were synthesized. These metal complexes perform as positive-tone, directly photopatternable indium tin oxide (ITO) or titanium oxide film pre...

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Bibliographic Details
Published in:Langmuir 2011-03, Vol.27 (6), p.3157-3165
Main Authors: Cordonier, Christopher E. J, Nakamura, Akimasa, Shimada, Kazuhiko, Fujishima, Akira
Format: Article
Language:English
Subjects:
Chemistry
Devices and Applications: Sensors, Fluidics, Patterning, Catalysis, Photonic Crystals
Exact sciences and technology
General and physical chemistry
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Summary:Photoacid generating ligands, 4-(2-nitrobenzy-loxycarbonyl)catechol and 4-(6-nitroveratryloxycarbonyl)catechol, and indium tin and titanium complexes thereof, were synthesized. These metal complexes perform as positive-tone, directly photopatternable indium tin oxide (ITO) or titanium oxide film precursors. After exposure, acid-bearing selectively soluble complexes could be removed to give patterned films upon developing in aqueous base, which were transformable to the corresponding pattern-preserving metal oxide film. Micropatterning of ITO and titanium oxide films was accomplished with the photoreactivity of the 2-nitrobenzyloxycarbonyl (NBOC) and 6-nitroveratryloxycarbonyl (NVOC) moiety bearing ligands.
ISSN:0743-7463
1520-5827
DOI:10.1021/la104259f