Soft-x-ray projection lithography experiments using Schwarzschild imaging optics

Soft-x-ray projection imaging is demonstrated by the use of 14-nm radiation from a laser plasma source and a single-surface multilayer-coated ellipsoidal condenser. Aberrations in the condenser and the Schwarzschild imaging objective are characterized and correlated with imaging performance. A new S...

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Bibliographic Details
Published in:Applied optics (2004) 1993-12, Vol.32 (34), p.7068-7071
Main Authors: Tichenor, D A, Kubiak, G D, Malinowski, M E, Stulen, R H, Haney, S J, Berger, K W, Brown, L A, Sweatt, W C, Bjorkholm, J E, Freeman, R R, Himel, M D, Macdowell, A A, Tennant, D M, Wood, R, Bokor, J, Jewell, T E, Mansfield, W M, Waskiewicz, W K, White, D L, Windt, D L
Format: Article
Language:English
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Summary:Soft-x-ray projection imaging is demonstrated by the use of 14-nm radiation from a laser plasma source and a single-surface multilayer-coated ellipsoidal condenser. Aberrations in the condenser and the Schwarzschild imaging objective are characterized and correlated with imaging performance. A new Schwarzschild housing, designed for improved alignment stability, is described.
ISSN:1559-128X
DOI:10.1364/AO.32.007068