Development of microwave ion source for industrial applications

A microwave ion source is one of the long-life ion sources. In this paper, we report on the characteristics of the extracted Ar ion beam produced by a microwave ion source under various conditions, in terms of magnetic flux distribution and mass flow, and the stability of the ion beam. The measured...

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Bibliographic Details
Published in:Review of scientific instruments 2014-02, Vol.85 (2), p.02C306-02C306
Main Authors: Takahashi, N, Murata, H, Mitsubori, H, Sakuraba, J, Soga, T, Aoki, Y, Katoh, T, Saitoh, Y, Yamada, K, Ikenaga, N, Sakudo, N
Format: Article
Language:English
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Summary:A microwave ion source is one of the long-life ion sources. In this paper, we report on the characteristics of the extracted Ar ion beam produced by a microwave ion source under various conditions, in terms of magnetic flux distribution and mass flow, and the stability of the ion beam. The measured spectra show that, under the experimental condition, almost all of produced ions were Ar(+) ions. For more than 6 h, the ion beam was stable.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.4826675