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Selective catalytic burning of graphene by SiO sub(x) layer depletion

We report catalytic decomposition of few-layer graphene on an Au/SiO sub(x)/Si surface wherein oxygen is supplied by dissociation of the native SiO sub(x) layer at a relatively low temperature of 400 degree C. The detailed chemical evolution of the graphene covered SiO sub(x)/Si surface with and wit...

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Bibliographic Details
Published in:Nanoscale 2014-01, Vol.6 (3), p.1474-1479
Main Authors: Lee, Kyoung-Jae, Ihm, Kyuwook, Kumar, Yogesh, Baik, Jaeyoon, Yang, Mihyun, Shin, Hyun-Joon, Kang, Tai-Hee, Chung, Sukmin, Hong, Byung Hee
Format: Article
Language:English
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Summary:We report catalytic decomposition of few-layer graphene on an Au/SiO sub(x)/Si surface wherein oxygen is supplied by dissociation of the native SiO sub(x) layer at a relatively low temperature of 400 degree C. The detailed chemical evolution of the graphene covered SiO sub(x)/Si surface with and without gold during the catalytic process is investigated using a spatially resolved photoelectron emission method. The oxygen atoms from the native SiO sub(x) layer activate the gold-mediated catalytic decomposition of the entire graphene layer, resulting in the formation of direct contact between the Au and the Si substrate. The notably low contact resistivity found in this system suggests that the catalytic depletion of a SiO sub(x) layer could realize a new way to micromanufacture high-quality electrical contact.
ISSN:2040-3364
2040-3372
DOI:10.1039/c3nr04692c