Fabrication and characterization of high efficiency green nanopillar LED

InGaN/GaN green multiple quantum well (MQW) nanopillar light emitting diodes (LEDs), ∼150nm in diameter and 700nm in height, were fabricated by inductively coupled plasma etching using a Ni self-assembled nano-size mask. 2.5- and 7-fold improvement in the photoluminescence intensity was recorded for...

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Bibliographic Details
Published in:Journal of crystal growth 2013-05, Vol.370, p.332-335
Main Authors: Ju, Jin-Woo, Hyeob Baek, Jong, Lee, Seung-Jae, Jeon, Dae-Woo, Park, Jae-Woo, Choi, Jung-Hun, Jang, Lee-Woon, Lee, In-Hwan
Format: Article
Language:English
Subjects:
A1. HRXRD
A3. Epitaxial lateral overgrowth
A3. MOCVD
Applied sciences
B2. Semipolar GaN
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Crystal growth
Discharges for spectral sources (including inductively coupled plasmas)
Electric discharges
Electronics
Exact sciences and technology
Gallium nitrides
Indium gallium nitrides
Inductively coupled plasma
Light-emitting diodes
Materials science
Methods of nanofabrication
Nanocomposites
Nanomaterials
Nanostructure
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optoelectronic devices
Photoluminescence
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Self-assembly
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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Summary:InGaN/GaN green multiple quantum well (MQW) nanopillar light emitting diodes (LEDs), ∼150nm in diameter and 700nm in height, were fabricated by inductively coupled plasma etching using a Ni self-assembled nano-size mask. 2.5- and 7-fold improvement in the photoluminescence intensity was recorded for the 515 and 543nm green LED sample, respectively. Since the size and the shape of both samples were similar, it is believed that the higher In content LEDs would produce more strain relaxation through the fabrication of a nanopillar. ► The green MQW nanopillar LEDs were fabricated by ICP etching using a Ni nano-size mask. ► The PL intensity of the 515 and 543nm sample showed 2.5 and 7 times improvement, respectively. ► Bigger enhancement of a longer wavelength sample was caused by more strain relaxation. ► At the same wavelength, nanopillar showed a superior PL intensity compared with conventional sample.
ISSN:0022-0248
1873-5002
DOI:10.1016/j.jcrysgro.2012.08.051