Influence of molar concentration on the physical properties of nebulizer-sprayed ZnO thin films for ammonia gas sensor

Zinc oxide (ZnO) thin films were deposited by nebulizer spray pyrolysis technique with different molar concentrations of 0.05M, 0.10M and 0.15M. The films were characterized by structural, morphological, electrical and optical properties. X-ray diffraction confirms that the all films are polycrystal...

Full description

Saved in:
Bibliographic Details
Published in:Materials science in semiconductor processing 2013-10, Vol.16 (5), p.1328-1335
Main Authors: Mariappan, R., Ponnuswamy, V., Ragavendar, M.
Format: Article
Language:English
Subjects:
Applied sciences
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Crystallites
Deposition
Diffraction
Electrical properties
Energy gap
Exact sciences and technology
General equipment and techniques
Inhalers
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Materials science
Metals. Metallurgy
Methods of deposition of films and coatings
film growth and epitaxy
Nebulizer spray pyrolysis
Optical properties
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Photoluminescence
Physics
Production techniques
Semiconductors
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
Spray coating techniques
Surface treatment
Thin films
X-ray diffraction
Zinc oxide
ZnO films
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Zinc oxide (ZnO) thin films were deposited by nebulizer spray pyrolysis technique with different molar concentrations of 0.05M, 0.10M and 0.15M. The films were characterized by structural, morphological, electrical and optical properties. X-ray diffraction confirms that the all films are polycrystalline in nature with hexagonal crystal structure having preferential orientation along (002) plane and the maximum crystallite size is found to be ∼77nm. The band gap energy increases with molar concentration and reaches a maximum value of 3.2eV at 0.15M. Room temperature photoluminescence measurements were performed and band to band emission energies of ZnO films were determined. High resolution scanning electron microscopy shows the uniform distribution, densely packed grains with a plate like structure of ∼55nm (0.05M).
ISSN:1369-8001
1873-4081
DOI:10.1016/j.mssp.2012.10.012