Actuation of silicon pillar micro-mechanical resonators by Kelvin polarization force

[Display omitted] •2D model of the dielectric devices.•Study of the interactions between pillar displacement and Kelvin polarization force.•Four different electrical configurations have been studied.•Investigation on hysteresis phenomena.•The sample vibrating mode has been observed by SEM. Pillars r...

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Bibliographic Details
Published in:Microelectronic engineering 2013-11, Vol.111, p.1-6
Main Authors: Toffoli, Valeria, Dandash, Fadlallah, Pozzato, Alessandro, Borin, Daniele, Carrato, Sergio, Lazzarino, Marco
Format: Article
Language:English
Subjects:
Acoustic wave devices, piezoelectric and piezoresistive devices
Actuation
Applied sciences
Circuit properties
Density
Design. Technologies. Operation analysis. Testing
Electric, optical and optoelectronic circuits
Electronic circuits
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Integrated circuits
Kelvin
Levers
Liquids
Mechanical instruments, equipment and techniques
MEMS
Micromechanical devices and systems
Oscillators, resonators, synthetizers
Physics
Pillar
Pillars
Polarization
Resonators
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Strategy
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Summary:[Display omitted] •2D model of the dielectric devices.•Study of the interactions between pillar displacement and Kelvin polarization force.•Four different electrical configurations have been studied.•Investigation on hysteresis phenomena.•The sample vibrating mode has been observed by SEM. Pillars resonators arrays are emerging as powerful sensors for their peculiar characteristics, namely high mass sensitivity, high active areas density and operation in liquid. On the other hand, their characteristic vertical geometry and fabrication strategy hinders a direct integration within integrated circuits. So far, the examples reported in literature are based on a bulk piezoelectric actuation and optical lever detection, which are not suitable for further integration. In this paper we report on the design, fabrication and characterization of Kelvin polarization force actuated pillar resonator. This work represents the first step toward a full integration of pillars with on-chip electronic actuation and detection.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2013.05.013