Note: error elimination for ellipsometry by laser feedback instrument

Ellipsometry has in recent decades been used in measuring optical phase retardation. Known for its high resolution but uncertain accuracy, we analyze the systematic error involved with this technique and give error values regarding phase retardation measurements. We developed a laser-feedback assemb...

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Bibliographic Details
Published in:Review of scientific instruments 2014-04, Vol.85 (4), p.046114-046114
Main Authors: Chen, Wenxue, Zhang, Shulian, Long, Xingwu, Ni, Zhibin, Yang, Biwu
Format: Article
Language:English
Subjects:
Assembly
Ellipsometry
Error analysis
Feedback
Phase retardation
Scientific apparatus & instruments
Uncertainty analysis
Wave plates
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Summary:Ellipsometry has in recent decades been used in measuring optical phase retardation. Known for its high resolution but uncertain accuracy, we analyze the systematic error involved with this technique and give error values regarding phase retardation measurements. We developed a laser-feedback assembly to measure phase retardation to a higher resolution and accuracy compared with that from ellipsometry. We eliminated the systematic error associated with ellipsometry using results obtained with this assembly and improved measurement accuracies for ellipsometry to about 0.2°. Such high-precision ellipsometry would greatly improve the manufacturing of wave plates.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.4874315