Highly charged ion scattering on single-crystalline (0001) and (0001¯) zinc-oxide surfaces

The angular (φ-) dependences of the yields of scattered ions and neutrals were measured when 8–80 keV Ar8+ ions were obliquely incident on the single-crystalline ZnO (0001) and (0001¯) surfaces at small incidence angles of ψ = 5, 7, and 9° measured relative to the plane of the surface. The φ depende...

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Bibliographic Details
Published in:Vacuum 2014-06, Vol.104, p.22-28
Main Authors: Motohashi, Kenji, Ikeda, Tokihiro, Kojima, Takao M., Suzuki, Yuki
Format: Article
Language:English
Subjects:
Charging
Highly charged ions
Incidence angle
Ion scattering
Polarity
Scattering
Simulation
Single crystals
Small incidence angle
Specular reflection
Surface polarity
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Summary:The angular (φ-) dependences of the yields of scattered ions and neutrals were measured when 8–80 keV Ar8+ ions were obliquely incident on the single-crystalline ZnO (0001) and (0001¯) surfaces at small incidence angles of ψ = 5, 7, and 9° measured relative to the plane of the surface. The φ dependences of the yields had a peak near the specular reflection angle that is φ ∼ 2ψ. The maximum yields of the (0001¯) surfaces at the peaks were almost twice as large as those of the (0001) surfaces at each incidence angle ψ for a given energy E. A faint difference between the two polarity surfaces was observed in the ψ-dependences of the maximum yields. The influence of the surface polarity on the scattering processes was examined by comparison with simulated results. •Scattering yields of multicharge Ar ions were measured on ZnO surfaces.•The yields had a peak near the specular reflection angle.•Maximum yields of (0001¯) surfaces were twice as large as those of (0001) surfaces.
ISSN:0042-207X
1879-2715
DOI:10.1016/j.vacuum.2013.12.017