Effect of thickness on the microstructure, surface morphology and optical properties of N-incorporated β-Ga2O3 films

•The film thickness affects the microstructure, morphology and optical properties.•The crystallinity quality can be improved by increasing the film thickness.•The UV absorption edge shifts to longer wavelength.•The optical band gap has a small change with increasing the film thickness. To investigat...

Full description

Saved in:
Bibliographic Details
Published in:Superlattices and microstructures 2014-01, Vol.65, p.146-151
Main Authors: Sun, Rui, Zhang, Hua-Yu, Wang, Gui-Gen, Han, Jie-Cai, Wang, Xin-Zhong, Cui, Lin, Kuang, Xu-Ping, Zhu, Can, Jin, Lei
Format: Article
Language:English
Subjects:
Band gap
Crystallinity
Diffraction
Film thickness
Microstructure
Morphology
Nitrogen incorporated
Opacity
Optical properties
Radio frequencies
RF magnetron sputtering
Transmittance
β-Ga2O3
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:•The film thickness affects the microstructure, morphology and optical properties.•The crystallinity quality can be improved by increasing the film thickness.•The UV absorption edge shifts to longer wavelength.•The optical band gap has a small change with increasing the film thickness. To investigate the effect of thickness on the microstructure, surface morphology and optical properties of N-incorporated β-Ga2O3 films, a series of N-incorporated β-Ga2O3 samples with different thicknesses were prepared by radio frequency (RF) magnetron sputtering method. X-ray diffraction measurements show that the crystallinity quality was improved by increasing the film thickness. Atomic force microscopy results show that the surface exhibits hillock and island morphology under different film thicknesses. The optical transmittance of all samples is more than 80% in the visible range. The UV absorption edge shifts to longer wavelength, and the small change in the optical band gap value is due to the improved crystallinity of the films.
ISSN:0749-6036
1096-3677
DOI:10.1016/j.spmi.2013.11.004