Simulation of layer measurement with confocal micro-XRF

A simple model to simulate the measurement of layered structures with confocal micro X‐ray fluorescence (micro‐XRF) was developed and implemented as a computer program. The model assumes monochromatic excitation, considers at the moment only K lines, and simplifies the volume defined by excitation a...

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Bibliographic Details
Published in:X-ray spectrometry 2014-05, Vol.43 (3), p.175-179
Main Authors: Huber, Christian, Smolek, Stephan, Streli, Christina
Format: Article
Language:English
Subjects:
Computer programs
Computer simulation
Confocal
Excitation
K lines
Spectrometry
X-ray fluorescence
X-rays
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Description
Summary:A simple model to simulate the measurement of layered structures with confocal micro X‐ray fluorescence (micro‐XRF) was developed and implemented as a computer program. The model assumes monochromatic excitation, considers at the moment only K lines, and simplifies the volume defined by excitation and detection foci as a circle area. First simulation results and comparison with data acquired using the Atominstitut confocal micro‐XRF spectrometer are very promising. The simulation software enables us to perform parameter studies to have a better understanding of the analysis of layered structures with confocal micro‐XRF. Copyright © 2014 John Wiley & Sons, Ltd.
ISSN:0049-8246
1097-4539
DOI:10.1002/xrs.2536