Nanoscale surface tracking of laser material processing using phase shifting diffraction interferometry

Phase shifting diffraction interferometry (PSDI) was adapted to provide real-time feedback control of a laser-based chemical vapor deposition (LCVD) process with nanometer scale sensitivity. PSDI measurements of laser heated BK7 and fused silica substrates were used to validate a finite element mode...

Full description

Saved in:
Bibliographic Details
Published in:Optics express 2014-06, Vol.22 (12), p.14493-14504
Main Authors: Guss, Gabriel M, Sridharan, Arun K, Elhadj, Selim, Johnson, Michael A, Matthews, Manyalibo J
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Phase shifting diffraction interferometry (PSDI) was adapted to provide real-time feedback control of a laser-based chemical vapor deposition (LCVD) process with nanometer scale sensitivity. PSDI measurements of laser heated BK7 and fused silica substrates were used to validate a finite element model that accounts for both refractive index changes and displacement contributions to the material response. Utilizing PSDI and accounting for the kinetics of the modeled thermomechanical response, increased control of the LCVD process was obtained. This approach to surface tracking is useful in applications where extreme environments on the working surface require back-side optical probing through the substrate.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.22.014493