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Nanoporous silicon nitride membranes fabricated from porous nanocrystalline silicon templates

The extraordinary permeability and manufacturability of ultrathin silicon-based membranes are enabling devices with improved performance and smaller sizes in such important areas as molecular filtration and sensing, cell culture, electroosmotic pumping, and hemodialysis. Because of the robust chemic...

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Bibliographic Details
Published in:Nanoscale 2014-01, Vol.6 (18), p.1798-185
Main Authors: DesOrmeaux, J. P. S, Winans, J. D, Wayson, S. E, Gaborski, T. R, Khire, T. S, Striemer, C. C, McGrath, J. L
Format: Article
Language:English
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Summary:The extraordinary permeability and manufacturability of ultrathin silicon-based membranes are enabling devices with improved performance and smaller sizes in such important areas as molecular filtration and sensing, cell culture, electroosmotic pumping, and hemodialysis. Because of the robust chemical and mechanical properties of silicon nitride (SiN), several laboratories have developed techniques for patterning nanopores in SiN using reactive ion etching (RIE) through a template structure. These methods however, have failed to produce pores small enough for ultrafiltration (
ISSN:2040-3364
2040-3372
DOI:10.1039/c4nr03070b