A Proposal for Improved Helium Microscopy

Elimination of the electrostatic objective lens and alternative use of a Cc- and Cs-corrected quadrupole doublet may increase the useful working distance of the helium microscope, improve its resolution from 3 to 0.3 Å, and improve its optimum convergence angle from 0.4 to 4 mrad.

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Bibliographic Details
Published in:Microscopy and microanalysis 2014-10, Vol.20 (5), p.1619-1622
Main Author: Martin, Frederick W.
Format: Article
Language:English
Subjects:
Electron microscopes
Fourier transforms
Helium
Instrumentation and Techniques Development
Ion beams
Microscopy
Sensors
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Description
Summary:Elimination of the electrostatic objective lens and alternative use of a Cc- and Cs-corrected quadrupole doublet may increase the useful working distance of the helium microscope, improve its resolution from 3 to 0.3 Å, and improve its optimum convergence angle from 0.4 to 4 mrad.
ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927614000555