Large-area assembly of three-dimensional nanoparticle structures via ion assisted aerosol lithography with a multi-pin spark discharge generator

We present an approach utilizing ion assisted aerosol lithography (IAAL) with a newly designed multi-pin spark discharge generator (SDG) for fabricating large-area three-dimensional (3D) nanoparticle-structure (NPS) arrays. The design of the multi-pin SDG allows us to uniformly construct 3D NPSs on...

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Bibliographic Details
Published in:Nanotechnology 2014-06, Vol.25 (22), p.225302-9
Main Authors: Ha, Kyungyeon, Choi, Hoseop, Jung, Kinam, Han, Kyuhee, Lee, Jong-Kwon, Ahn, KwangJun, Choi, Mansoo
Format: Article
Language:English
Subjects:
aerosol
Aerosols
Arrays
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Fullerenes and related materials
Generators
Lithography
Materials science
Methods of nanofabrication
Nanocrystalline materials
Nanolithography
nanoparticle assembly
Nanoscale materials and structures: fabrication and characterization
Nanostructure
nanostructuring
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Physics
Spark discharge
Three dimensional
Variability
Visible and ultraviolet spectra
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Summary:We present an approach utilizing ion assisted aerosol lithography (IAAL) with a newly designed multi-pin spark discharge generator (SDG) for fabricating large-area three-dimensional (3D) nanoparticle-structure (NPS) arrays. The design of the multi-pin SDG allows us to uniformly construct 3D NPSs on a large area of 50 mm × 50 mm in a parallel fashion at atmospheric pressure. The ion-induced focusing capability of IAAL significantly reduces the feature size of 3D NPSs compared to that of the original pre-patterns formed on a substrate. The spatial uniformity of 3D NPSs is above 95% using the present multi-pin SDG, which is far superior to that of the previous single-pin SDG with less than 32% uniformity. The effect of size distributions of nanoparticles generated via the multi-pin SDG on the 3D NPSs also has been studied. In addition, we measured spectral reflectance for the present 3D NPSs coated with Ag, demonstrating enhanced diffuse reflectance.
ISSN:0957-4484
1361-6528
DOI:10.1088/0957-4484/25/22/225302