Tracking of Triangular Reference Signals Using LQG Controllers for Lateral Positioning of an AFM Scanner Stage

This paper presents the design of an internal reference model-based optimal linear quadratic Gaussian (LQG) controller for the lateral positioning of a piezoelectric tube actuator (PTA) used in an atomic force microscope (AFM). In this control design, internal modeling of the reference signal and sy...

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Bibliographic Details
Published in:IEEE/ASME transactions on mechatronics 2014-08, Vol.19 (4), p.1105-1114
Main Authors: Habibullah, H., Pota, H. R., Petersen, Ian R., Rana, M. S.
Format: Article
Language:English
Subjects:
Atomic force microscope (AFM)
Atomic force microscopy
Compensators
Controllers
Creep
Design engineering
Electrodes
Electron tubes
Frequency control
Frequency measurement
linear quadratic Gaussian controller
Mathematical model
Mechatronics
Microscopes
Optimization
piezoelectric tube actuator (PTA)
Reference signals
Simulation
system identification
Vibration
vibration compensator
Vibrations
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Summary:This paper presents the design of an internal reference model-based optimal linear quadratic Gaussian (LQG) controller for the lateral positioning of a piezoelectric tube actuator (PTA) used in an atomic force microscope (AFM). In this control design, internal modeling of the reference signal and system error are considered. As a result, the steady-state tracking error is minimized. In addition to the LQG controller, a vibration compensator is incorporated with the plant to suppress the vibration of the PTA at the resonance frequency. It achieves a high closed-loop bandwidth and significant damping of the resonant mode of the PTA, which enables a reference triangular signal to be tracked. Comparison of performance of the optimal LQG controller augmented with a vibration compensator and a PI controller demonstrates that the proposed controller shows significant improvements over the existing AFM PI controller.
ISSN:1083-4435
1941-014X
DOI:10.1109/TMECH.2013.2270560