Polymer-based route to ferroelectric lead strontium titanate thin films

ABSTRACT Ceramic films with high values of ferroelectricity, piezoelectricity, and dielectricity with perovskite structure, like lead zirconate titanate (PZT, PbZrxTi1‐xO3), lead strontium titanate (PST, PbxSr1‐xTiO3), and barium strontium titanate (BST, BaxSr1−xTiO3), are subjects of intensive rese...

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Bibliographic Details
Published in:Journal of applied polymer science 2014-12, Vol.131 (24), p.n/a
Main Authors: Benkler, Manuel, Hobmaier, Jost, Gleißner, Uwe, Medesi, Anna, Hertkorn, Daniel, Hanemann, Thomas
Format: Article
Language:English
Subjects:
Barium strontium titanates
Ceramics
Ferroelectricity
irradiation
Lead zirconate titanates
Materials science
Perovskites
photopolymerization
Polymers
Precursors
Strontium titanates
thermogravimetric analysis
Thin films
X-ray
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Summary:ABSTRACT Ceramic films with high values of ferroelectricity, piezoelectricity, and dielectricity with perovskite structure, like lead zirconate titanate (PZT, PbZrxTi1‐xO3), lead strontium titanate (PST, PbxSr1‐xTiO3), and barium strontium titanate (BST, BaxSr1−xTiO3), are subjects of intensive research due to their use in sensors, energy harvesters, capacitors, and FeRAMs. Here a novel, simple way to produce micropatterned perovskite PST thin films on silicon substrates by a polymer‐based direct UV‐lithography process is presented. By acrylic acid modification of PST precursor sols it is possible to generate photosensitive metal organic PST precursor xerogel films by spin‐coating and subsequently drying on silicon wafers. These films can be patterned by UV‐lithography and developed with organic solvents. The resulting patterned gel films can be crystallized in air via rapid thermal annealing. The obtained perovskite thin ceramic films are polycrystalline and fine grained. © 2014 Wiley Periodicals, Inc. J. Appl. Polym. Sci. 2014, 131, 40901.
ISSN:0021-8995
1097-4628
DOI:10.1002/app.40901