Spatial-phase-shift imaging interferometry using a spectrally modulated white light source

An extension of the white light spatial-phase-shift (WLSPS) for object surface measurements is described. Using WLSPS, surface measurements can be obtained from any real object image without the need of a reference beam, thus achieving inherent vibration cancellation. The surface topography is obtai...

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Bibliographic Details
Published in:Optics letters 2014-12, Vol.39 (24), p.6966-6968
Main Authors: Epshtein, Shlomi, Harris, Alon, Yaacobovitz, Igor, Locketz, Garrett, Yitzhaky, Yitzhak, Arieli, Yoel
Format: Article
Language:English
Subjects:
Image Processing, Computer-Assisted
Interferometry
Light
Optical Imaging - methods
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Description
Summary:An extension of the white light spatial-phase-shift (WLSPS) for object surface measurements is described. Using WLSPS, surface measurements can be obtained from any real object image without the need of a reference beam, thus achieving inherent vibration cancellation. The surface topography is obtained by acquiring multiple images of an object illuminated by a spectrally modulated white light source and using an appropriate algorithm. The modulation of the light source obviates the need for the continuous phase delay to obtain the interferograms.
ISSN:0146-9592
1539-4794
DOI:10.1364/OL.39.006966