Development of electroplated Ni–xZn films for under bump metallization application

The feasibility of using electroplated Ni–xZn films was evaluated for a new application as the under bump metallization. Considering the alloy films in electroplating process, determining the deposition potential (affecting nucleation) and current density (affecting growth) is crucial. A suitable Ni...

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Bibliographic Details
Published in:Surface & coatings technology 2013-12, Vol.237, p.445-449
Main Authors: Lin, Hsiu-Min, Duh, Jenq-Gong
Format: Article
Language:English
Subjects:
Anomalous co-deposition
Applied sciences
Constant current density
Constant deposition potential
Cross-disciplinary physics: materials science
rheology
Density
Deposition
Electroplating
Exact sciences and technology
Intermetallic compounds
Liquids
Low currents
Materials science
Metallic coatings
Metallizing
Metals. Metallurgy
Nickel
Ni–Zn
Nucleation
Physics
Production techniques
Surface treatment
Surface treatments
Under bump metallization
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Summary:The feasibility of using electroplated Ni–xZn films was evaluated for a new application as the under bump metallization. Considering the alloy films in electroplating process, determining the deposition potential (affecting nucleation) and current density (affecting growth) is crucial. A suitable Ni–5Zn film exhibiting smooth and dense surface was derived at a low current density of 0.067ASD. After a 30s liquid reaction, intermetallic phase formation and Cu6Sn5 growth at the interface were visualized and analyzed using a field-emission electron probe microanalyzer. This study demonstrated that binary Ni–Zn films fabricated by electroplating might be a potential candidate for under bump metallization application. •New application of electroplating Ni–Zn films have been developed as the novel UBM.•Ni-rich Zn films are successfully derived at the lower potential and current density.•Smooth and dense Ni–5Zn film revealed via the lower constant current density process.
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2013.08.056