Structural and optical properties of ZnO films produced by a modified ultrasonic spray pyrolysis technique

• Published in: Thin solid films 2014-01, Vol.551, p.13-18
• Main Authors: Silva, T.G., Silveira, E., Ribeiro, E., Machado, K.D., Mattoso, N., Hümmelgen, I.A.
• Format: Article
• Language: English
• Subjects: Cathodoluminescence, ionoluminescence; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Diffraction; Exact sciences and technology; Growth from vapor; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Optical properties; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties of specific thin films; Other luminescence and radiative recombination; Physics; Raman spectroscopy; Spray coating techniques; Spray pyrolysis; Structure and morphology; thickness; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thermogravimetry; Thin film structure and morphology; Thin films; X-rays; Zinc acetate; Zinc compounds; Zinc oxide
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2013.11.011

In this work we present a modification of the usual ultrasonic spray pyrolysis method and tested its ability to produce good quality films by producing ZnO films. Our method consists of keeping the sprayed substrate at room temperature and, after that, a thermal treatment under a chosen environment and temperature is made. We used this method to produce ZnO films considering two environments, air and air+vapor of zinc acetate, and two temperatures, 400°C and 450°C. The ZnO films were investigated by X-ray diffraction, scanning electron microscopy, cathodoluminescence, thermogravimetry/simultaneum differential thermal analysis and Raman spectroscopy techniques, and results indicated that ZnO films produced under air+vapor of zinc acetate at 400°C are the best films obtained by our modified method. •A variation of the ultrasonic spray pyrolysis (USP) technique is introduced.•ZnO films were produced using the modification of the USP technique.•High quality ZnO films were produced at a lower temperature than those used in other studies.