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Thin film underlayer effects on mass resolving power in laser-assisted atom probe tomography

The effects of varying Co thickness on the mass resolving power for Cu in a multilayer stack are characterized by laser-assisted atom probe. As the Co layer thickness increased, Cu exhibited poorer mass resolving power. By reducing the pulse repetition rate from 250kHz to 10kHz, the mass resolving p...

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Published in:Thin solid films 2014-01, Vol.551, p.32-36
Main Authors: Tippey, K., Brons, J.G., Kapoor, M., Fu, B., Thompson, G.B.
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cited_by cdi_FETCH-LOGICAL-c360t-bb9612ca62231224d4d952aa24923dbff14439bf8202814efdca3b2662c73cb83
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container_title Thin solid films
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creator Tippey, K.
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description The effects of varying Co thickness on the mass resolving power for Cu in a multilayer stack are characterized by laser-assisted atom probe. As the Co layer thickness increased, Cu exhibited poorer mass resolving power. By reducing the pulse repetition rate from 250kHz to 10kHz, the mass resolving power improved to match that of Cu with no Co underlayer. These results support that thermal mechanisms for field evaporation dominate in this Co–Cu multilayer, which is a common architecture in giant magneto-resistance thin film devices. •Multilayer thin film stacks of different thermal conductivity materials were studied.•Increasing thickness of the insulating layer decreased mass resolving power.•Lowering the laser pulse rate increased the mass resolving power.•Demonstrates the ability to study stacks of different conductivity materials.
doi_str_mv 10.1016/j.tsf.2013.11.083
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subjects Atom probe tomography
Atomic properties
Condensed matter: structure, mechanical and thermal properties
Copper
Evaporation
Exact sciences and technology
Mass resolving power
Multilayers
Physical properties of thin films, nonelectronic
Physics
Pulse repetition rate
Resolution
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thermal conductivity
Thermal stability
thermal effects
Thin film structure and morphology
Thin films
Tomography
title Thin film underlayer effects on mass resolving power in laser-assisted atom probe tomography
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