Wear tests of ZrC and ZrN thin films grown by pulsed laser deposition

•ZrC and ZrN films were grown by pulsed laser deposition on Si wafers at 500°C.•AES investigations results indicated that films contain less than 2% O in bulk.•Uniaxial reciprocating sliding tests found a friction coefficient of around 0.3 and a wear rate of only 4.5×10−6mm3/Nm for the ZrN films. Ve...

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Bibliographic Details
Published in:Applied surface science 2014-07, Vol.306, p.33-36
Main Authors: Dorcioman, G., Socol, G., Craciun, D., Argibay, N., Lambers, E., Hanna, M., Taylor, C.R., Craciun, V.
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Density
Deposition
Diffraction
Exact sciences and technology
Hard coatings
Physics
Pulsed laser deposition
Surface layer
Texture
Thin films
Wear tests
X-rays
ZrC
ZrN
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Summary:•ZrC and ZrN films were grown by pulsed laser deposition on Si wafers at 500°C.•AES investigations results indicated that films contain less than 2% O in bulk.•Uniaxial reciprocating sliding tests found a friction coefficient of around 0.3 and a wear rate of only 4.5×10−6mm3/Nm for the ZrN films. Very thin ZrC and ZrN films (
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2013.12.048