Wear tests of ZrC and ZrN thin films grown by pulsed laser deposition

•ZrC and ZrN films were grown by pulsed laser deposition on Si wafers at 500°C.•AES investigations results indicated that films contain less than 2% O in bulk.•Uniaxial reciprocating sliding tests found a friction coefficient of around 0.3 and a wear rate of only 4.5×10−6mm3/Nm for the ZrN films. Ve...

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Published in:Applied surface science 2014-07, Vol.306, p.33-36
Main Authors: Dorcioman, G., Socol, G., Craciun, D., Argibay, N., Lambers, E., Hanna, M., Taylor, C.R., Craciun, V.
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Density
Deposition
Diffraction
Exact sciences and technology
Hard coatings
Physics
Pulsed laser deposition
Surface layer
Texture
Thin films
Wear tests
X-rays
ZrC
ZrN
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cited_by cdi_FETCH-LOGICAL-c369t-e6ce8e211617ccbf2607da9fd682c9796cecd057e25443e836ee3b2d635709463
cites cdi_FETCH-LOGICAL-c369t-e6ce8e211617ccbf2607da9fd682c9796cecd057e25443e836ee3b2d635709463
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container_start_page 33
container_title Applied surface science
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creator Dorcioman, G.
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description •ZrC and ZrN films were grown by pulsed laser deposition on Si wafers at 500°C.•AES investigations results indicated that films contain less than 2% O in bulk.•Uniaxial reciprocating sliding tests found a friction coefficient of around 0.3 and a wear rate of only 4.5×10−6mm3/Nm for the ZrN films. Very thin ZrC and ZrN films (
doi_str_mv 10.1016/j.apsusc.2013.12.048
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Very thin ZrC and ZrN films (&lt;500nm) were grown on (100) Si substrates at 500°C by the pulsed laser deposition (PLD) technique using a KrF excimer laser. X-ray reflectivity investigations showed that films exhibited mass densities similar to bulk values. X-ray diffraction investigations found that films were nanocristalline, exhibited a (111) texture and high micro-strain values. Auger electron spectroscopy investigations indicated that films contained in bulk a relatively low oxygen concentration, usually below 2.0%. 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subjects Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Density
Deposition
Diffraction
Exact sciences and technology
Hard coatings
Physics
Pulsed laser deposition
Surface layer
Texture
Thin films
Wear tests
X-rays
ZrC
ZrN
title Wear tests of ZrC and ZrN thin films grown by pulsed laser deposition
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