Study of the effects of E × B fields as mechanism to carbon-nitrogen plasma immersion ion implantation on stainless steel samples

Effects of E B fields as mechanism to carbon-nitrogen plasma immersion ion implantation (PIII) have been investigated. This magnetic configuration when used in PIII allows obtaining high nitrogen plasma density close to the ion implantation region. Consequently, high ions dose on the target is possi...

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Bibliographic Details
Published in:Applied surface science 2014-08, Vol.310, p.300-304
Main Authors: PILLACA, E. J. D. M, UEDA, M, OLIVEIRA, R. M, PICHON, L
Format: Article
Language:English
Subjects:
Bombardment
Carbon
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Density
Diffraction
Exact sciences and technology
Immersion
Ion implantation
Physics
Stainless steels
Tribology
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Summary:Effects of E B fields as mechanism to carbon-nitrogen plasma immersion ion implantation (PIII) have been investigated. This magnetic configuration when used in PIII allows obtaining high nitrogen plasma density close to the ion implantation region. Consequently, high ions dose on the target is possible to be achieved compared with standard PIII. In this scenario, nitrogen and carbon ions were implanted simultaneously on stainless steel, as measured by GDOES and detected by X-ray diffraction. Carbon-tape disposed on the sample-holder was sputtered by intense bombardment of nitrogen ions, being the source of carbon atoms in this experiment. The implantation of both N and C caused changes on sample morphology and improvement of the tribological properties of the stainless steel.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2014.04.003