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LSMO thin films with high metal-insulator transition temperature on buffered SOI substrates for uncooled microbolometers
La0.67Sr0.33MnO3 (LSMO) thin films have been grown by a pulsed laser deposition (PLD) on Bi4Ti3O12(BTO)/CeO2/YSZ buffered silicon-on-insulator (SOI) substrates. We compare the properties of these films with results of other authors. We analyse structural properties of LSMO/BTO/CeO2/YSZ/SOI multilaye...
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Published in: | Applied surface science 2014-09, Vol.312, p.30-33 |
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Main Authors: | , , , , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | La0.67Sr0.33MnO3 (LSMO) thin films have been grown by a pulsed laser deposition (PLD) on Bi4Ti3O12(BTO)/CeO2/YSZ buffered silicon-on-insulator (SOI) substrates. We compare the properties of these films with results of other authors. We analyse structural properties of LSMO/BTO/CeO2/YSZ/SOI multilayer structure prepared using PLD. Electrical measurements have shown that the temperature corresponding to maximum of resistance derivative (operating temperature of a microbolometer) is about 330K (well above room temperature) and the highest resistivity of metal-insulator transition is at temperature (T P) above 400K. Temperature coefficient of the resistance (TCR) has achieved values of 3.4%K-1 at 325K for some LSMO films. Transmission electron microscopy analysis has confirmed epitaxial growth of all the layers and showed a mosaic character of the LSMO films due to strain relaxation. |
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ISSN: | 0169-4332 1873-5584 |
DOI: | 10.1016/j.apsusc.2014.05.051 |