Fabrication of diamond-like carbon-based two-dimensional photonic crystals

• Published in: Microelectronic engineering 2014-08, Vol.126, p.99-102
• Main Authors: Yun, J.G., Jung, D.H., Kim, H.J., Choi, W.S., Hong, B.Y., Noda, S., Song, B.S.
• Format: Article
• Language: English
• Subjects: Applied sciences; Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.); Circuit properties; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Cross-disciplinary physics: materials science; rheology; Diamond-like carbon; Diamond-like carbon films; Electric, optical and optoelectronic circuits; Electron-beam lithography; Electronics; Exact sciences and technology; Inductively coupled plasma; Inductively coupled plasma etching; Integrated optics. Optical fibers and wave guides; Materials; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Optical and optoelectronic circuits; Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties of bulk materials and thin films; Photonic crystals; Physics; Refractive index; Refractivity; Silicon; Two dimensional
• ISSN: 0167-9317; 1873-5568
• DOI: 10.1016/j.mee.2014.06.030

[Display omitted] •A process for fabricating DLC-based two-dimensional photonic crystals is developed.•Plasma chemical vapor deposition was used to deposit a DLC layer.•The feasibility of DLC-based photonic crystals is theoretically investigated.•A DLC photonic crystal was successfully fabricated using the developed process. In this paper, we discuss the development of a process for fabricating diamond-like carbon (DLC)-based two-dimensional photonic crystals with a wider electronic bandgap and better thermostability than silicon (Si), which is used widely in nanophotonics. In the developed process, the DLC film was deposited on an Si substrate by RF plasma chemical vapor deposition, and the refractive index of the film could be changed from 1.8 to 1.95 by varying the RF power. We also theoretically show that a wide photonic bandgap can be obtained with these DLC-based photonic crystals, even though they have a low refractive index compared to pure diamond. Finally, we develop a process for fabricating DLC-based photonic crystal structures by using electron-beam lithography and inductively coupled plasma (ICP) etching techniques.