Approximate linear relation between reduced modulus and stiffness in completely amorphous Si–C–N films

An approximately linear relation between reduced modulus (Er) and stiffness (S) was observed based on the characterization of completely amorphous Si–C–N hard films by means of nanoindentation. This linear relation was verified by a series of amorphous Si–C–N films prepared under different experimen...

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Bibliographic Details
Published in:Surface & coatings technology 2014-11, Vol.258, p.343-346
Main Authors: Zhuang, Chunqiang, Fuchs, Regina, Schlemper, Christoph, Zhang, Lei, Vogel, Michael, Staedler, Thorsten, Jiang, Xin
Format: Article
Language:English
Subjects:
Approximation
Coatings
Contact
Cross-disciplinary physics: materials science
rheology
Erbium
Exact sciences and technology
Hardness
Linear relation
Materials science
Nanoindentation
Physics
Reduced modulus
Stiffness
Surface treatments
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Summary:An approximately linear relation between reduced modulus (Er) and stiffness (S) was observed based on the characterization of completely amorphous Si–C–N hard films by means of nanoindentation. This linear relation was verified by a series of amorphous Si–C–N films prepared under different experimental conditions. Furthermore the linear relation can be extended to amorphous Si–B–C–N film systems. This finding provides one possible way to evaluate the hardness and reduced modulus of a material without involving the contact area. •Synthesizing completely amorphous Si–(B)–C–N hard films•Obtaining hard films with very smooth surface•Finding approximate linear relation between reduced modulus and stiffness
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2014.09.004